Features & Benefits
- Ultra-compact: 2.2 x 4.3 x 6.9 cm
- High turndown ratio - up to 1000:1
- Flow range from 0-1 ml/min to 0-100 l/min
- Optional He & H₂ compatibility
- Accuracy: ± 0.3% full scale
- Analytical clean version available
- Fast time-to-market through complete sub-assemblies
- Cest performance-to-cost ratio
Technical Information
Sensor: Thermal MFC sensor
Flow ranges:
- 0-0,2 ls/min
- 0-0,5 ls/min
- 0-1 ls/min
- 0-2 ls/min
- 0-5 ls/min
- 0-10 ls/min
- 0-20 ls/min
- On request: Lower flows (down to 0-1 ml/min) Higher flows (up to 0-150 l/min)
Standard conditions: P=1013 mbar (1 atm), T=20°C
Operating gas: Air, N2 , O2 , CO2 , Ar, neutral gas (*1) Multigas, He/H2 on request
Accuracy
- ± 0,2% of full scale (0-10% of max flow)
- ± 2,0% of reading (10%-100% of max flow)
Repeatability: <1% of reading
Operating voltage: 24 VDC ±10%
Current supply: < 100 mA
Electrical connection: JST Connector BM06B-GHS-TBT
Analog input/output control: 0 ... 5 VDC
Pneumatic connections:
- In line version (G1/8’’)
- In line version (M5)
- Manifold mount
Weight: 125g
Digital communication interfaces: RS232, RS485, Modbus RTU, other interfaces on request
Digital communication protocol: Proprietary protocol
Seal material: FPM
USP class VI seals on request
Gas temperature: +10 ... +50°C (°50 ... +122°F)
Ambient temperature: +10 ... +50°C (°50 ... +122°F)
Dynamic range:
- Standard: 500:1
- Premium: 1000:1
Setting time: <500 ms
Response time: 100-500 ms, depending on conditions (*2)
Thermal drift:
- ±0,004% of full scale per °C (0-10% of max flow)
- ±0,04% of reading per °C (10-100% of max flow)
Additional options: USP class VI seals, stainless steel manifold for bioreactors
MFC are calibrated with Air at 5 barg inlet, 0 barg outlet, 20°C. Conversion factors (Kfactors) are applied for other gases:
For N2 and O2, accuracy and repeatibility unchanged. For Ar and CO2 , repeatibility <1%, accuracy +/-10%. For better accuracy, needs to be calibrated with specific gas on request. When switching from one gas to another, it is common practice to flush before use with new gas.