Features & Benefits
    • Ultra-compact: 2.2 x 4.3 x 6.9 cm
    • High turndown ratio - up to 1000:1
    • Flow range from 0-1 ml/min to 0-100 l/min
    • Optional He & H₂ compatibility
    • Accuracy: ± 0.3% full scale
    • Analytical clean version available
    • Fast time-to-market through complete sub-assemblies
    • Cest performance-to-cost ratio

    Sensor: Thermal MFC sensor 

    Flow ranges: 

    • 0-0,2 ls/min 
    • 0-0,5 ls/min 
    • 0-1 ls/min 
    • 0-2 ls/min 
    • 0-5 ls/min 
    • 0-10 ls/min 
    • 0-20 ls/min 
    • On request: Lower flows (down to 0-1 ml/min) Higher flows (up to 0-150 l/min) 

    Standard conditions: P=1013 mbar (1 atm), T=20°C 

    Operating gas: Air, N2 , O2 , CO2 , Ar, neutral gas (*1) Multigas, He/H2 on request 

    Accuracy 

    • ± 0,2% of full scale (0-10% of max flow) 
    • ± 2,0% of reading (10%-100% of max flow) 

    Repeatability: <1% of reading 

    Operating voltage: 24 VDC ±10% 

    Current supply: < 100 mA 

    Electrical connection: JST Connector BM06B-GHS-TBT 

    Analog input/output control: 0 ... 5 VDC 

    Pneumatic connections

    • In line version (G1/8’’) 
    • In line version (M5) 
    • Manifold mount 

    Weight: 125g 

    Digital communication interfaces: RS232, RS485, Modbus RTU, other interfaces on request 

    Digital communication protocol: Proprietary protocol

    Seal material: FPM 

    USP class VI seals on request 

    Gas temperature: +10 ... +50°C (°50 ... +122°F) 

    Ambient temperature: +10 ... +50°C (°50 ... +122°F) 

    Dynamic range: 

    • Standard: 500:1 
    • Premium: 1000:1 

    Setting time: <500 ms 

    Response time: 100-500 ms, depending on conditions (*2) 

    Thermal drift

    • ±0,004% of full scale per °C (0-10% of max flow) 
    • ±0,04% of reading per °C (10-100% of max flow) 

    Additional options: USP class VI seals, stainless steel manifold for bioreactors 

     

    MFC are calibrated with Air at 5 barg inlet, 0 barg outlet, 20°C. Conversion factors (Kfactors) are applied for other gases: 

    For N2 and O2, accuracy and repeatibility unchanged. For Ar and CO2 , repeatibility <1%, accuracy +/-10%. For better accuracy, needs to be calibrated with specific gas on request. When switching from one gas to another, it is common practice to flush before use with new gas.